First-principles predictions of ruthenium-phosphorus and ruthenium-boron glassy structures and chemical vapor deposition of thin amorphous ruthenium-boron alloy films

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ژورنال

عنوان ژورنال: Thin Solid Films

سال: 2017

ISSN: 0040-6090

DOI: 10.1016/j.tsf.2016.12.016